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Application
Plasma etching and cleaning processes applied in semiconductor and flat-panel display manufacturing
Correct technical of the goods | NITROGEN TRIFLUORIDE | Trade name | N/A |
UN No. | UN 2451 | Main components (formula) | HF |
Physical and chemical properties and | At room temperature, it is a colorless gas and has no odor when pure; in commercial products, it often has a moldy or irritating smell. Its melting point is -207℃, its boiling point is -129℃, and its density is approximately 1.537–1.89 g/cm³. It is insoluble in water and does not react with dilute acids or dilute bases. It is stable at room temperature and slowly decomposes into F₂ and N₂F₄ at temperatures above 350℃; it can react with AlCl₃ at 70℃. It is toxic. Inhalation can cause headache, vomiting, and diarrhea; long-term exposure to low concentrations can damage teeth and bones and cause fluorosis. It is a strong oxidizing agent. Contact with reducing agents, flammable substances (such as benzene, sugar, hydrogen gas) can react violently or even explode. It decomposes upon heating to produce toxic hydrogen fluoride (HF) gas. | ||
Purposes of the product | Etching and cleaning processes applied to LCD and OLED panels; Plasma etching for | ||
Packaging | Tank: 44L, 47L, or ISO tank; Cargo packaging category: Class II. | ||
Safety measures and precautions for carriage by ships. | Only qualified special steel cylinders or aluminum alloy cylinders that have passed | ||
Emergency medical treatment. | It is highly irritating, toxic and corrosive. It has a strong corrosive effect on the skin, | ||
Method for firefighting. | It is not flammable by itself and is a strong oxidizer, but it can also assist in combustion. When heated, exposed to flames, electric sparks, or in contact with flammable substances or reducing agents, it may cause combustion or even explosion. Fire extinguishing agents: mist water, foam, dry powder, carbon dioxide. | ||
Method to deal with leakage. | Immediately evacuate all personnel from the contaminated area to the upwind | ||
Formulashouldbeindicatedforasinglesubstanceandmaincomponentsforamixture. | |||
SECTION 3.Composition/Information on ingredients | ||||||
substance☑ | mixture□ | |||||
Substance name | contents, % | CAS No. | ||||
Doc.No.: Z/1000-P18-006-2023 | Nitrogen trifluoride | Revised Date: 7/10/2019 | ||||
Release date: 18/12/2025 | ||||||
Rev: A/2 | ||||||
Based on GB30000、 | ||||||
Nitrogen trifluoride | 100 | 7783-54-2 | ||||
