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High Purity Nitrogen Trifluoride NF3

Nitrogen Trifluoride NF3 is a high-purity electronic specialty gas with a purity of 99.999%. It is classified as UN 2451 and Danger Category 2.2+5.1, indicating a non-flammable compressed gas with strong oxidizing properties. NF3 is mainly used in plasma etching and chamber cleaning processes for semiconductor manufacturing, LCD/OLED flat-panel displays, silicon and silicon nitride etching, and thin-film solar cell production. It can also be used as a fluorine source in laser applications. The product should be handled with proper ventilation, kept away from heat, fire sources, reducing agents, and flammable materials, and stored in qualified gas cylinders under strict safety conditions.
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Application

Plasma etching and cleaning processes applied in semiconductor and flat-panel display manufacturing

Correct technical of the goods

NITROGEN TRIFLUORIDE

Trade name

N/A

UN No.
Dangerous Goods Category

UN 2451
2.2+5.1

Main components

(formula)

HF

Physical and chemical properties and
main hazards.

At room temperature, it is a colorless gas and has no odor when pure; in commercial products, it often has a moldy or irritating smell. Its melting point is -207℃, its boiling point is -129℃, and its density is approximately 1.537–1.89 g/cm³. It is insoluble in water and does not react with dilute acids or dilute bases. It is stable at room temperature and slowly decomposes into F₂ and N₂F₄ at temperatures above 350℃; it can react with AlCl₃ at 70℃. It is toxic. Inhalation can cause headache, vomiting, and diarrhea; long-term exposure to low concentrations can damage teeth and bones and cause fluorosis. It is a strong oxidizing agent. Contact with reducing agents, flammable substances (such as benzene, sugar, hydrogen gas) can react violently or even explode. It decomposes upon heating to produce toxic hydrogen fluoride (HF) gas.

Purposes of the product

Etching and cleaning processes applied to LCD and OLED panels; Plasma etching for
silicon (Si) and silicon nitride (Si₃N₄); As a fluorine source for hydrogen fluoride-
fluorine gas (HF-OF) lasers; Used as etching and cleaning gases in the production of
thin-film solar cells.

Packaging

Tank: 44L, 47L, or ISO tank;

Cargo packaging category: Class II.

Safety measures and precautions for carriage by ships.

Only qualified special steel cylinders or aluminum alloy cylinders that have passed
inspection can be used for filling. During transportation, they must be protected from
moisture, heat and rain. They should be kept away from fire sources, heat sources
and smoking areas. When handling the cylinders, safety helmets must be worn and
shock rings should be used. The cylinders should be handled with care, loaded and
unloaded gently to avoid collisions and damage.

Emergency medical treatment.

It is highly irritating, toxic and corrosive. It has a strong corrosive effect on the skin,
eyes and mucous membranes of the respiratory tract. In case of contact, a large
amount of water should be used for rinsing.

Method for firefighting.

It is not flammable by itself and is a strong oxidizer, but it can also assist in combustion. When heated, exposed to flames, electric sparks, or in contact with flammable substances or reducing agents, it may cause combustion or even explosion. Fire extinguishing agents: mist water, foam, dry powder, carbon dioxide.

Method to deal with leakage.

Immediately evacuate all personnel from the contaminated area to the upwind
direction and isolate the area. It is recommended that emergency responders wear
self-contained positive pressure breathing apparatus and wear protective clothing
against toxic and cold hazards. Do not directly contact the leaked substance. Try to
cut off the source of the leakage. For small leaks: use spray water to suppress the
spread of vapor, avoid water contact, and prevent it from entering sewers, water
bodies or basements. Allow it to evaporate naturally. For large leaks: initially
isolate at least 500 meters, strictly prohibit open flames, sparks or high-temperature
sources, and use strong ventilation or natural diffusion to accelerate gas dilution.

Formulashouldbeindicatedforasinglesubstanceandmaincomponentsforamixture.
Properties should include state, color, odour, melting point, flash point, explosion limits, poisonous concentration, LD50/LC50
The testing reports issued by technical inspection organizations should be attached.
Compatibility between the car go an others; description of the danger of the car go in contact with others.
Packaging should include:material, state, thickness, closure, inner lining, outer securing  and unit weight.

SECTION 3.Composition/Information on ingredients

substance☑

mixture□

Substance name

contents, %

CAS No.

Doc.No.: Z/1000-P18-006-2023

Nitrogen trifluoride
Safety Data Sheet
(SDS)

Revised Date: 7/10/2019

Release date: 18/12/2025

Rev: A/2

Based on GB30000、
GB/T17519、GB16483 etc.

Nitrogen trifluoride

100

7783-54-2

With a robust technical talent pool and strong independent R&D capabilities, our products—including semiconductor-grade electronic-grade hydrofluoric acid, nitrogen trifluoride, sulfur hexafluoride, and carbon tetrafluoride...

Contact Info

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Email: justinqi@bequeenchemical.com
WhatsApp: +8618858788277
Add: No. 16-89, Lane 199, Ye Fan Road, Ye Xie Town, Songjiang District, Shanghai

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