Electronic Grade Carbon Tetrafluoride CF4

Application

Plasma etching in the microelectronics industry; refrigeration and insulation; in laser technology, carbon tetrafluoride serves as a laser working gas; in aerospace, it is used for rocket attitude control; additionally, it functions as a solvent, lubricant, protective gas in metal smelting, and an additive in plastic synthesis.

1．Chemicals and Company Identification Chemical Chinese Name: Carbon tetrafluoride

Chemical Common Name or Trade Name: Carbon tetrafluoride

Chemical English Name: Carbon tetrafluoride

Product Recommendation and Restricted Uses: It is used in plasma etching processes for various integrated circuits, and also as a laser gas and a refrigerant at low temperatures.

Supplier’s details:

Supplier (Manufacturer): Shanghai Beiling Trading Co., Ltd

Address: No.16-89, Lane 199,Yefan Road,Yexie Town, Songjiang District, Shanghai,

P.R.C

Telephone/Fax: +86-577-67141808 Emergency phone number: +86-577-67141808

2．Overview of Risks

Emergency situation overview: Colorless and odorless compressed gas.The pure substance is basically non-toxic, but when mixed with hydrogen fluoride and difluoroxygen, the toxicity increases. Exposure to an oxygen-deficient environment can cause the following symptoms: dizziness, salivation, nausea, loss of mobility/loss of consciousness, heart disease.

GHS Hazard Class:

Compressed gas / Pressurized gas

Specific target organ toxicity - single exposure Category 3 (anesthetic effect)

Label elements:

Icon:

Warning word: Danger

Risk description: Contains gas under pressure. May explode upon heating. May cause Precautionary measures:

Preventive measures: Do not inhale dust/smoke/gas/smoke/fog. Can only be used outdoors or in well-ventilated areas. Handle with care, avoid damaging the cylinder and its accessories.

Emergency response:

If inhaled accidentally: Move the victim to an area with fresh air and maintain a comfortable resting position. If feeling unwell, seek medical attention.

Safe storage:

Avoid exposure to sunlight. Store in a well-ventilated area.

Disposal:

Refer to national and local regulations before disposal.

Physical and chemical hazards:This product is non-flammable but can quickly cause asphyxiation.When working in tanks, restricted spaces or high concentration areas, someone must be on guard.

Health hazards: Pure product is basically non-toxic, but when mixed with hydrogen fluoride and difluorine oxide, the toxicity increases. Exposure to an oxygen-deficient environment can cause the following symptoms: dizziness, salivation, nausea, loss of mobility/loss of consciousness, heart disease.

Environmental hazards: Fluorinated hydrocarbons are relatively stable in the lower atmosphere and can be decomposed by more energetic ultraviolet rays in the upper atmosphere.

3． Component/Composition Information Substance/Mixture: Substance

No.

Perfluorocarbon CF4 ≥99.999 75-73-0 200-896-5 UN1982

4． Emergency Measures

Aid:

Skin Contact: Not Applicable.

Eye Contact: Not Applicable.

Inhalation: If inhaled, quickly move away from the contaminated area to an area with fresh air. Keep the airway clear. If breathing is difficult, administer oxygen. If breathing stops, perform artificial respiration immediately and seek medical attention. Ingestion: Not through this route of contact.

5．Fire Prevention Measures

Fire extinguishing agent: Use water in mist form,foam, carbon dioxide, or dry powder to extinguish the fire.

Special hazards:This product is non-flammable. In the fire scene, there is a risk of container cracking and explosion.

Fire extinguishing precautions and protective measures: Firefighters must wear selfcontained positive pressure breathing apparatus and fire protection suits, and extinguish the fire from a safe distance. Spray water to cool the container, and if possible, move the container from the fire scene to an open area. Isolate the accident site and prohibit irrelevant personnel from entering.

6．Emergency Response for Leakage

Work personnel protection measures, protective equipment and emergency handling procedures: Establish a warning zone based on the affected area of gas diffusion. Unrelated personnel should evacuate to a safe area from the side or upwind direction. Provide proper ventilation to accelerate the diffusion. It is recommended that emergency handling personnel wear positive pressure self-contained breathing apparatus. Prohibit contact or crossing of the leaked substance.Try to cut off the source of leakage. Environmental protection measures:Avoid releasing into the environment.Try to recover and process the leaked gas to prevent the leaked gas from entering basements or confined spaces.

Methods for containing and clearing the leaked chemicals and the materials used for handling:Area ventilation. Monitor oxygen content.

7． Operation, Disposal and Storage

Operating precautions: Conduct operations in a sealed environment and enhance ventilation. Operators must undergo specialized training and strictly follow operating procedures. Prevent gas from leaking into the air of the workplace. Handle with care during transportation, and avoid damaging the cylinders and accessories. Equip with corresponding types and quantities of fire-fighting equipment and emergency handling devices for leakage.After use, the residual pressure of the gas cylinder should not be lower than 0.05 MPa. Close the cylinder valve after use.

Storage precautions: Store in a cool,well-ventilated warehouse.The warehouse temperature should not exceed 40℃. Keep away from fire sources and heat sources. Avoid direct sunlight. Equip with corresponding types and quantities of fire-fighting equipment.

8．Contact Control / Personal Protection Occupational exposure limit: No data.

Biological limit: No data.

Monitoring method: No data.

Engineering control:The production process is sealed and there is comprehensive ventilation. Personal protective equipment:

Respiratory protection: Generally no special protection is required. In case of high concentration exposure, it is recommended to wear an air respirator.

Hand protection:Wear general work gloves.

Eye protection:Wear safety glasses when necessary. Skin and body protection:Wear general work shoes.

Special protective measures:Avoid contact with eyes.Wash hands immediately before rest and after the operation and product handling.

9．Physical and Chemical Properties

Appearance and Properties: Colorless and odorless gas

Molecular Weight: 88.01

pH Value: Not applicable

Melting Point/Freezing Point (°C): -183.6 Boiling Point (°C): -127.9

Flash Point (°C): -188

Lower Explosive Limit [% (V/V)]: -Upper Explosive Limit [% (V/V)]: -

Saturated Vapor Pressure (kPa): 13.33 (-150 .7°C) Steam Density (air = 1): 3.09

Relative Density (water = 1): 1.61 Flammability: Non-flammable

Octanol/Water Partition Coefficient: No data Ignition Temperature (°C): -

Decomposition Temperature (°C): Not applicable

Heat of Combustion (kJ/mol): -Critical Temperature (°C): -45.7 Critical Pressure (MPa): 3.745

Solubility: Insoluble in water.

10． Stability and Reactivity Stability: Stable

Dangerous reactions: None.

Conditions to avoid contact: Open flames, light, heat sources.

Incompatible substances: Strong oxidants,flammable or combustible materials.

Combustion decomposition products: Hydrogen fluoride.